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Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces

Journal paper

Links:
Authors:

Chia-Wei Chen
Matthias Hartrumpf
Thomas Längle
Jürgen Beyerer

Source:

Journal of Vacuum Science Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 38 no. 1, 2020.

Pages:

014005

ISSN:

2166-2746