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Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces

Zeitschriftenartikel

Links:
Autoren:

Chia-Wei Chen
Matthias Hartrumpf
Thomas Längle
Jürgen Beyerer

Quelle:

Journal of Vacuum Science Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 38 Nr. 1, 2020.

Seiten:

014005

ISSN:

2166-2746