Automatische Inspektion spiegelnder Oberflächen mittels inverser Muster

Journal paper


Stefan Werling
Jürgen Beyerer


tm Technisches Messen 74 Nr. 4, Oldenbourg Verlag, München, 2007.



The application of inverse patterns to fast and robust mirror surface evaluation is shown. In a well controlled environment, one observes via the mirror surface a screen onto which a well-defined pattern is displayed. Evaluation of the deflected pattern is used to determine surface defects of the object under test. In some cases it is possible to calculate inverse patterns in advance, in which the surface topography is given implicitly. Using these inverse patterns results in bottom-of-the-range and fast surface examination, which is a benefit compared to the commonly used deflectometric methods.