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Measurement of ellipsometric data and surface orientations by modulated circular polarized light

Journal paper

Links:
Authors:

Chia-Wei Chen
Matthias Hartrumpf
Thomas Längle
Jürgen Beyerer

Source:

tm - Technisches Messen 86 no. s1, De Gruyter Oldenbourg, 2019.

Pages:

32--36

ISSN:

2196-7113